Russia Has Manufactured the First Lithography Machine: Capable of Producing 350nm Process Chips

27 May 2024 1539


In the field of semiconductor manufacturing, lithography machines are known as the “heart of chip manufacturing.” Currently, the mainstream equipment on the market is DUV (deep ultraviolet) lithography machine, which can manufacture chips with 7nm and above processes. However, with the continuous evolution of process technology, EUV (extreme ultraviolet light) equipment has gradually become the core of future lithography technology and advanced processes. In this field, ASML, relying on its excellent technical strength, occupies the vast majority of the global lithography machine market. However, Russia did not choose to rely on external supplies, but firmly embarked on the path of independent research and development.


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Recently, Vasily Shpak, Deputy Minister of Industry and Trade of the Russian Federation, announced at the “Industrial Russia Digital Industry” conference that Russia’s first independently developed lithography machine has been manufactured and is undergoing testing. This equipment can ensure the production of 350nm process chips, which can be widely used in industries such as automobiles, energy and telecommunications. This major breakthrough has attracted widespread attention from the global technology community. The successful development of this lithography machine has filled Russia’s gap in this field, making Russia one of the few countries in the world with the ability to develop and produce lithography machines.


To further advance the development of semiconductor manufacturing technology, Russia has set its next goal. They plan to launch a 130nm lithography machine prototype by 2026 and continue to move towards higher-precision 90nm and even more advanced lithography technology. The Novgorod Institute of Applied Physics also revealed that Russia is expected to achieve full production of 7nm chip lithography machines in 2028. In addition, the Russian Academy of Sciences is also actively exploring X-ray lithography technology with a view to developing high-performance lithography systems in the next few years.


It is reported that this Russian lithography machine is affordable, with each unit costing only 5 million rubles, which is equivalent to about 367,400 yuan. This price is enough to buy 20 units of this machine in Shanghai. In comparison, the ASML company’s EUV lithography machine appears to be expensive, with a set of equipment costing about 180 million US dollars, while the more advanced high numerical aperture EUV lithography machine sells for up to 350 million euros.


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What is the level of the 350nm process chip? It is equivalent to Intel’s Pentium 120MHz processor (P54CQS) introduced in 1995. Today, it is mainly used in fields that do not have high requirements on chip technology, such as power semiconductors, analog chips, sensors or low-end microcontrollers (MCU), military products, etc. In addition, its applications may also include various types of FPV (first person perspective) equipment and disposable items such as “suicide scooters”, which are used for a relatively short time.


If Russia can stably mass-produce 350nm chips, it can basically solve the problem of military chips. For high-precision equipment such as fighter jets and hypersonic weapons produced in Russia, chips produced by the Mikron Group can already provide sufficient computing speed. While these chips may not be technologically the most advanced, they are still a major breakthrough for Russia as it reduces its reliance on external technology and increases the autonomy and competitiveness of its domestic industry.


Russian Minister of Industry and Trade Denis Manturov said that the successful development of this lithography machine is an important milestone in the development of the Russian electronics industry. It will provide Russian electronics companies with advanced production equipment and help these companies improve product quality and market competitiveness. At the same time, the research and development of this lithography machine will also cultivate a group of professionals in the field of lithography machine R&D and production for Russia, laying a solid foundation for the long-term development of the Russian electronics industry.


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Although Russia has made significant breakthroughs in lithography machine technology, there is still a certain gap compared with the world’s top levels. At present, the global leaders in lithography machine technology are mainly concentrated in the ASML company and Japan’s Canon and Nikon. Relying on years of technology accumulation and continuous innovation, these companies have been able to produce lithography machines with more refined processes and more stable performance. In terms of accuracy and efficiency, the world’s top-level lithography machines achieve higher processing accuracy and faster production efficiency by adopting more advanced optical systems and control algorithms. In comparison, Russian lithography machines may need further optimization and improvement in these aspects. In terms of performance, the world’s top-level lithography machines have been able to achieve more sophisticated chip manufacturing processes. For example, ASML’s EUV lithography technology can already produce chips as fine as 3 nanometers or even 2 nanometers. Russia’s first lithography machine currently only has the ability to produce 350-nanometer chips, and this gap may be difficult to completely make up in the short term.


In general, Russia’s achievements in the field of domestic lithography machines have undoubtedly injected great confidence and motivation into Russia’s semiconductor industry, and also marked a significant change in the international technology competition landscape. This achievement not only demonstrates Russia’s independent innovation capabilities in the high-tech field, but also heralds the improvement of Russia’s status in the global semiconductor industry chain. However, Russia still needs to maintain a clear head and firm determination in the face of future challenges. As the core equipment in semiconductor manufacturing, lithography machines have high technical difficulties and long research and development cycles, requiring a large investment of funds, talents and time. Therefore, Russia needs to continue to increase its investment in the research and development of lithography machines and strive to improve its technical level and production capabilities to meet the growing domestic demand for chips.




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